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Tribology Issues and Opportunities in MEMS Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

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Beschreibung

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

30.06.1998

Abbildungen

XIV, 655 p.

Herausgeber

Bharat Bhushan

Verlag

Springer Netherland

Seitenzahl

655

Maße (L/B/H)

24/16/3,6 cm

Gewicht

1056 g

Auflage

1998

Sprache

Englisch

ISBN

978-0-7923-5024-8

Beschreibung

Portrait

Dr. Bharat Bhushan received an M.S. in mechanical engineering from the Massachusetts Institute of Technology in 1971, an M.S. in mechanics and a Ph.D. in mechanical engineering from the University of Colorado at Boulder in 1973 and 1976, respectively, an MBA from Rensselaer Polytechnic Institute at Troy, NY in 1980, Doctor Technicae from the University of Trondheim at Trondheim, Norway in 1990, a Doctor of Technical Sciences from the Warsaw University of Technology at Warsaw, Poland in 1996, and Doctor Honoris Causa from the Metal-Polymer Research Institute of National Academy of Sciences at Gomel, Belarus in 2000. He is a registered professional engineer (mechanical) and presently an Ohio Eminent Scholar and The Howard D. Winbigler Professor in the Department of Mechanical Engineering, Graduate Research Faculty Advisor in the Department of Materials Science and Engineering, and the Director of the Nanotribology Laboratory for Information Storage & MEMS/NEMS (NLIM) at the Ohio State University, Columbus, Ohio. He is an internationally recognized expert of tribology on the macro- to nanoscales, and is one of the most prolific authors in the field. He is considered by some a pioneer of the tribology and mechanics of magnetic storage devices and a leading researcher in the fields of nanotribology and nanomechanics using scanning probe microscopy and applications to micro/nanotechnology.

Produktdetails

Einband

Gebundene Ausgabe

Erscheinungsdatum

30.06.1998

Abbildungen

XIV, 655 p.

Herausgeber

Bharat Bhushan

Verlag

Springer Netherland

Seitenzahl

655

Maße (L/B/H)

24/16/3,6 cm

Gewicht

1056 g

Auflage

1998

Sprache

Englisch

ISBN

978-0-7923-5024-8

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  • Produktbild: Tribology Issues and Opportunities in MEMS
  • Produktbild: Tribology Issues and Opportunities in MEMS
  • MEMS R&D in Europe.- Integrated MEMS in Conventional CMOS.- Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review.- Microfabrication Technologies for High Performance Microactuators.- Surface Characterization of Non-Lithographic Micromachining.- Biosensors and Microfluidic Systems.- Power MEMS Materials and Structures.- MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization.- New Technology and Applications at Lucas NovaSensor.- Rough Surface Characterization.- Frictional Instabilities.- Wear of Ceramics and Metals.- Mechanics of Wear: From Conventional Components to MEMS.- Rheological Modeling of Thin Film Lubrication.- Surface Roughness Induced Effects in Hydrodynamic Lubrication.- Transition from Elastohydrodynamic to Partial Lubrication.- Micro/Nanotribology: State of the Art and Its Applications.- Pulsed Force Mode: A New Method for Characterizing Thin Silane Films by Adhesive Force Measurements.- Formation of Nanometer-Scale Contacts to Viscoelastic Materials: Implications for MEMS.- Nanotribology of Vapor-Phase Lubricants.- The Tribology of Hydrocarbon Surfaces Investigated Using Molecular Dynamics.- Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces.- Statistical Thermodynamic Treatment of the AFM Tip in Liquid.- Tribological Issues of Polysilicon Surface-Micromachining.- Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications.- Surface Force Induced Failures in Microelectromechanical Systems.- Development, Fabrication and Testing of a Multi-Stage Micro Gear System.- Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors.- Micro/Nanotribological Studies ofSingle-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices.- Phase Transformations in Semiconductors under Contact Loading.- Influence of Water Adsorption on Microtribology of Micromachines.- Tribological Effects of Surface Roughness in MEMS Devices.- Active Friction Control Using Ultrasonic Vibration.- Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch.- Metrology for MEMS Tribology.- Mechanical Property Determination Using Nanoindentation Techniques.- Stress in Thin Films for MEMS Actuators.- Reliability and Fatigue Testing of MEMS.- Surface Modification and Mechanical Properties of Bulk Silicon.- Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope: Mechanisms, Models and Micro- versus Macrotests.- Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination.- Deposition and Characterization of Diamond-Like Materials.- Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications.- a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature.- Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements.- Tribological Properties of Modified MEMS Surfaces.- Breakout Session Report: Tribology Research in MEMS.- Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices.- Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques.- Breakout Session Report: Mechanical Property Measurements.- Panel Discussion Report: Tribology Issues and Opportunities in MEMS.- List ofParticipants.- Editor’s Vita.